SU-8 DFR Series
The SU-8 DFR Series is an epoxy-based dry film resist designed for forming high-aspect-ratio structures.
Photolithography Resists Enabled by
Nippon Kayaku’s Materials Technology
Leveraging our proprietary epoxy resin technology, we develop advanced
dry film and liquid photoresists.
Our reliable materials support a broad range of applications, including
MEMS and semiconductor packaging.
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Product Overview
Dry Film Resists
Dry film resists are photosensitive materials that enable easy fabrication of cavity structures and other 3D patterns. They are well-suited for applications such as SAW/BAW RF filters that require precise, three-dimensional patterning.
After lamination, the film behaves similarly to liquid photoresists and can be removed with standard solvents. This enables high-aspect-ratio, high-resolution patterning. Dry films also eliminate the need for edge-bead removal and provide uniform thickness, helping streamline the manufacturing process.
KPM DFR Series
The KPM DFR Series is a dry film resist that enables both structure formation and substrate bonding with a single material.
Liquid Photoresists
Liquid photoresists allow controlled formation of thin to thick films by adjusting the coating conditions. They are used in a wide range of applications, including fine pattern formation for MEMS and semiconductor packaging, as well as dry etching processes. To meet diverse process requirements, we offer positive and negative types, with both solvent developable and alkaline developable formulations.
Scrollable content.
| Product Name | Application | Tone | Key Features |
|---|---|---|---|
| SU-8 Series | Permanent | Negative | Structure Formation |
| KMSF 2000 | Negative | Redistribution and Insulation Layers | |
| PermiNex | Negative | Substrate Bonding | |
| PMGI/LOR | Temporary | − | Lift-Off Process |
| UniLOR N | Negative | ||
| KMPR | Negative | Plating / Etching Mask | |
| TempKoat N | Negative | ||
| TempKoat P | Positive |
For detailed information on each product, please visit the Kayaku Advanced Materials website below.
Core Technologies
Advanced technologies, including dry film resist lamination.